Published in
Elsevier, Solid-State Electronics, 2(54), p. 158-163, 2010
DOI: 10.1016/j.sse.2009.12.012
Links
Tools
Fabrication of Silicon on Diamond (SOD) substrates by either the Bonded and Etched-back SOI (BESOI) or the Smart-Cut™ technology
Journal article published in 2010 by
J. Widiez,
M. Rabarot,
S. Saada,
J.-P. Mazellier,
J. Dechamp,
V. Delaye,
J.-C. Roussin,
F. Andrieu,
O. Faynot,
S. Deleonibus,
P. Bergonzo 
,
L. Clavelier
,
L. Clavelier
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Published version:
archiving forbidden
Data provided by 