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Elsevier, Surface and Coatings Technology, (280), p. 174-184, 2015

DOI: 10.1016/j.surfcoat.2015.09.001

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Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition

Journal article published in 2015 by G. Greczynski ORCID, J. Patscheider, J. Lu, B. Alling, A. Ektarawong, J. Jensen, I. Petrov, J. E. Greene, L. Hultman
This paper is available in a repository.
This paper is available in a repository.

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