Published in
Elsevier, Thin Solid Films, (552), p. 124-135, 2014
DOI: 10.1016/j.tsf.2013.11.112
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Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
Journal article published in 2014 by
Oili M. E. Ylivaara,
Xuwen Liu,
Lauri Kilpi,
Jussi Lyytinen,
Dieter Schneider,
Mikko Laitinen 
,
Jaakko Julin ,
Saima Ali ,
Sakari Sintonen,
Maria Berdova,
Eero Haimi,
Timo Sajavaara ,
Helena Ronkainen,
Harri Lipsanen,
Jari Koskinen
and other authors.
,
Jaakko Julin ,
Saima Ali ,
Sakari Sintonen,
Maria Berdova,
Eero Haimi,
Timo Sajavaara ,
Helena Ronkainen,
Harri Lipsanen,
Jari Koskinen
and other authors.
This paper was not found in any repository, but could be made available legally by the author.
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