Integration of atomic layer deposition CeO2 thin films with functional complex oxides and 3D patterns
Journal article published in 2014 by
M. Coll,
A. Palau,
J. C. Gonzalez-Rosillo 
,
J. Gazquez,
X. Obradors,
T. Puig
,
J. Gazquez,
X. Obradors,
T. Puig
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