Published in
Metallurgical Coatings and Thin Films 1991, p. 293-297
DOI: 10.1016/b978-0-444-89455-7.50058-7
Elsevier, Surface and Coatings Technology, 1-3(49), p. 293-297
DOI: 10.1016/0257-8972(91)90072-5
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High rate reactive sputtering of MoNx coatings
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