Published in
Metallurgical Coatings and Thin Films 1991, p. 284-289
DOI: 10.1016/b978-0-444-89455-7.50056-3
Elsevier, Surface and Coatings Technology, 1-3(49), p. 284-289
DOI: 10.1016/0257-8972(91)90070-d
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Multi-cathode unbalanced magnetron sputtering systems
Journal article published in 1991 by
William D. Sproul
This paper was not found in any repository, but could be made available legally by the author.
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