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IOP Publishing, Journal of Physics: Conference Series, (86), p. 012019, 2007

DOI: 10.1088/1742-6596/86/1/012019

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Plasma assisted growth of ultrathin nitrides on Si surfaces under ultrahigh vacuum conditions

Journal article published in 2007 by Per Morgen ORCID, Ali Bahari, Kjeld Pedersen ORCID, Zheshen S. Li
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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