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MEMS: A Practical Guide to Design, Analysis, and Applications, p. 93-186

DOI: 10.1007/978-3-540-33655-6_3

MEMS, p. 93-186

DOI: 10.1016/b978-081551497-8.50005-6

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MEMS and NEMS Simulation

Book chapter published in 2006 by Jan G. Korvink ORCID, Evgenii B. Rudnyi, Andreas Greiner, Zhenyu Liu
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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