Published in
Elsevier, Microelectronic Engineering, (156), p. 126-130, 2016
DOI: 10.1016/j.mee.2016.01.034
Links
Tools
The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias
Journal article published in 2016 by
Sten Vollebregt 
,
Sourish Banerjee ,
Frans D. Tichelaar,
Ryoichi Ishihara
,
Sourish Banerjee ,
Frans D. Tichelaar,
Ryoichi Ishihara
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Published version:
archiving forbidden
Data provided by 