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Elsevier, Applied Surface Science, (306), p. 52-55, 2014

DOI: 10.1016/j.apsusc.2014.03.189

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Optical properties of amorphous indium zinc oxide thin films synthesized by pulsed laser deposition

Journal article published in 2014 by V. Craciun, C. Martin, G. Socol, D. Tanner ORCID, H. C. Swart, N. Becherescu, D. Craciun
This paper is available in a repository.
This paper is available in a repository.

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Abstract

The optical properties of amorphous indium zinc oxide (a-IZO) films that were grown at room temperature by the pulsed laser deposition technique with the aid of a KrF excimer laser were investigated. Two values of 0.65 and 0.90 for the In/(In + Zn) films composition were chosen since they roughly define the area in the In-Zn-O phase diagram where good transmission in the visible range together with excellent electrical properties for a-IZO films were measured. The results of the investigations indicated that the IZO films containing 90 at.% In possessed excellent qualities: high transparency from 0.400 to 4 mu m, high reflectivity in the mid IR range together with a very low resistivity of 5 X 10(-4) Omega cm and a high mobility of 40 cm(2)/V s.