Published in
Wiley, physica status solidi (a) – applications and materials science, 2(211), p. 397-402, 2013
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Atomic layer deposition of ZrO 2 for graphene-based multilayer structures: In situ and ex situ characterization of growth process : Atomic layer deposition of ZrO 2 for graphene-based multilayer structures
Journal article published in 2013 by
Aile Tamm,
Jekaterina Kozlova,
Lauri Aarik,
Aleks Aidla,
Jun Lu,
Alma-Asta Kiisler,
Aarne Kasikov,
Peeter Ritslaid,
Hugo Mändar,
Lars Hultman,
Väino Sammelselg,
Kaupo Kukli,
Jaan Aarik
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