Published in
Elsevier, Thin Solid Films, (521), p. 141-145
DOI: 10.1016/j.tsf.2012.02.016
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An overview of diagnostic methods of low-pressure capacitively coupled plasmas
Journal article published in 2012 by
Yong-Xin Liu,
Wei Jiang,
Xiao-Song Li,
Wen-Qi Lu,
You-Nian Wang
This paper was not found in any repository, but could be made available legally by the author.
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