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Preparation of 1-3 PZT Composites Fabricated Using Micro PMMA Mold

This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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Abstract

We investigated preparation of 1-3 PZT composites for medical ultrasonic transducer array (briefly UTA) using micro pressing method. The proposed process was using pressing PZT green sheet by PMMA micro mold obtained from X-ray lithography. Microstructures, electriacl and electro-mechanical properties of fabricated composites were analyzed. Dielectric constant at 1kHz and thickness mode electro-mechanical coupling coefficient of $6.2mm{\times}6.2mm{\times}422{μ}m$ UTA sample were 1754 and 51%, respectively. Microstructures of sintered PZT showed dense and uniform. And PZT phases were well crystallized. Micro pressing method is a mass productive process in case of using injection molded PMMA by batch type LIGA process.