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Published in

IOP Publishing, Japanese Journal of Applied Physics, 7R(52), p. 071001, 2013

DOI: 10.7567/jjap.52.071001

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Microarea Strain Analysis in InGaN/GaN Multiple Quantum Wells onm-Plane Using High-Resolution Microbeam X-ray Diffraction

Journal article published in 2013 by Shunji Yoshida, Toshiya Yokogawa, Yasuhiko Imai, Shigeru Kimura ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Using high-resolution microbeam X-ray diffraction, we investigated in-plane anisotropic strain distributions within InGaN/GaN multiple quantum well structures on an m-plane GaN substrate. With this strain analysis, the micro-reciprocal space map (micro-RSM) and transmission electron microscopy measurements supported a structure without any dislocations and strain relaxations. From examining the microarea two-dimensional intensity profile map of the InGaN reflection peaks in the micro-RSMs, we consider that the in-plane anisotropic strain in the m-plane inclines toward the [1120] direction rather than the [0001] direction. On the basis of the slip system in the m-plane via the {1010} prism plane with <1120>-type slip directions that we have advocated, this anisotropy is in agreement with the causes of the strain relaxation in the prismatic plane with slip systems in the m-plane.