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IOP Publishing, Japanese Journal of Applied Physics, 4S(50), p. 04DN08, 2011

DOI: 10.1143/jjap.50.04dn08

IOP Publishing, Japanese Journal of Applied Physics, 4S(50), p. 04DN08

DOI: 10.7567/jjap.50.04dn08

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Simple fabrication technique for field-effect transistor array using as-grown single-walled carbon nanotubes

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This paper is available in a repository.

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Abstract

A carbon nanotube field-effect transistor (CNT-FET) is a promising candidate for future electronic devices; however, its fabrication process is still challenging. We propose a simple fabrication technique for CNT-FET arrays using as-grown single-walled CNTs (SWNTs) as the gate channel. In this study, a hydrophobic self-assembled monolayer (SAM) was used to restrict the catalyst-supporting area after the fabrication of an electrode array. Since it is known that droplets are trapped at rough edges of a hydrophobic surface, the deposition of a liquid-based catalyst, followed by alcohol catalytic chemical vapor deposition (ACCVD) produced SWNTs that grew only at the corners of electrode edges. The current–voltage (I–V) characterization of FETs with a 40 µm channel width showed that 98% of the fabricated devices were electrically connected and more than 50% were functional FETs (I ON/I OFF > 102).