Published in
Beilstein-Institut, Beilstein Journal of Nanotechnology, (6), p. 1883-1885, 2015
DOI: 10.3762/bjnano.6.191
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Focused particle beam-induced processing
Journal article published in 2015 by
Michael Huth,
Armin Gölzhäuser 
This paper is made freely available by the publisher.
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