Published in
Optica, Applied optics, 8(27), p. 1503, 1988
DOI: 10.1364/ao.27.001503
Society of Photo-optical Instrumentation Engineers, Proceedings of SPIE, 1988
DOI: 10.1117/12.942198
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Extreme ultraviolet reflectance degradation of aluminum and silicon from surface oxidation
Journal article published in 1988 by
Marion L. Scott,
Paul N. Arendt,
Bernard J. Cameron,
John M. Saber,
Brian E. Newnam
This paper was not found in any repository, but could be made available legally by the author.
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