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Aberration corrected TEM: current status and future prospects

Journal article published in 2008 by Ai I. Kirkland, S. J. Haigh ORCID, L.-Y. Chang
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Aberration correction leads to a substantial improvement in the interpretable resolution of Transmission Electron Microscopes. Electron optical correctors based on two strong hexapole elements linked through a round lens transfer doublet enables direct correction of all axial aberrations to third order. Subsequent, indirect computational analysis of a focal or tilt series of images offers the possibility of further compensation of the axial aberrations to fifth order. This paper describes 1(st) and 2(nd) generation aberration corrected instrumentation installed in Oxford and also the use of combinations of direct and indirect correction / compensation in a variety of different geometries to achieve specimen exit plane wavefunctions containing directly interpretable structural information significantly below 0.1 nm. ; Times Cited: 0 Baker, RT Mobus, G Brown, PD Electron Microscopy and Analysis Group Conference SEP 03-07, 2007 Glasgow Caledonian Univ, Glasgow, SCOTLAND