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Institute of Electrical and Electronics Engineers, IEEE Transactions on Electron Devices, 7(53), p. 1657-1668, 2006

DOI: 10.1109/ted.2006.876274

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Electrical characteristics of 8-/spl Aring/ EOT HfO/sub 2//TaN low thermal-budget n-channel FETs with solid-phase epitaxially regrown junctions

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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