Published in
Institute of Electrical and Electronics Engineers, IEEE Electron Device Letters, 8(27), p. 665-667, 2006
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Demonstration of short-channel self-aligned Pt/sub 2/Si-FUSI pMOSFETs with low threshold voltage (-0.29 V) on SiON and HfSiON
Journal article published in 2006 by
M. J. H. van Dal,
G. Boccardi,
A. Veloso,
S. Locorotondo,
X. Shi,
C. Demeurisse,
C. Vrancken,
R. Verbeeck,
A. Lauwers,
J. A. Kittl 
This paper was not found in any repository, but could be made available legally by the author.
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