Published in
IOP Publishing, Journal of Physics: Conference Series, 9(635), p. 092037, 2015
DOI: 10.1088/1742-6596/635/9/092037
IOP Publishing, Journal of Physics: Conference Series, 1(635), p. 012026, 2015
DOI: 10.1088/1742-6596/635/1/012026
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Spectroscopy for identification of plasma sources for lithography and water window imaging
Journal article published in 2015 by
Gerry O'Sullivan,
Padraig Dunne,
Takeshi Higashiguchi,
Bowen Li,
Luning Liu,
Ragava Lokasani 
,
Elaine Long,
Hayato Ohashi,
C. Diaz,
Fergal O'Reilly,
John Sheil,
Paul Sheridan,
I. Rabadan,
Emma Sokell ,
G. Garcia
and other authors.
,
Elaine Long,
Hayato Ohashi,
C. Diaz,
Fergal O'Reilly,
John Sheil,
Paul Sheridan,
I. Rabadan,
Emma Sokell ,
G. Garcia
and other authors.
This paper is made freely available by the publisher.
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