Published in
American Institute of Physics, Review of Scientific Instruments, 2(87), p. 02B702
DOI: 10.1063/1.4931719
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Molecular ion sources for low energy semiconductor ion implantation (invited)
Journal article published in 2016 by
A. Hershcovitch,
V. I. Gushenets,
D. N. Seleznev,
A. S. Bugaev,
S. Dugin,
E. M. Oks 
,
T. V. Kulevoy,
O. Alexeyenko,
A. Kozlov,
G. N. Kropachev,
R. P. Kuibeda,
S. Minaev,
A. Vizir,
G. Y.-U. Yushkov
,
T. V. Kulevoy,
O. Alexeyenko,
A. Kozlov,
G. N. Kropachev,
R. P. Kuibeda,
S. Minaev,
A. Vizir,
G. Y.-U. Yushkov
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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