Published in
Elsevier, Sensors and Actuators B: Chemical, 1-2(49), p. 22-29
DOI: 10.1016/s0925-4005(97)00337-7
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Thick oxidised porous silicon layer as a thermo-insulating membrane for high-temperature operating thin- and thick-film gas sensors
Journal article published in 1998 by
P. Maccagnani 
,
R. Angelucci,
P. Pozzi,
A. Poggi,
L. Dori,
G. C. Cardinali,
P. Negrini
,
R. Angelucci,
P. Pozzi,
A. Poggi,
L. Dori,
G. C. Cardinali,
P. Negrini
This paper was not found in any repository, but could be made available legally by the author.
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