Published in
Elsevier, Materials Science and Engineering: B, 1-3(101), p. 133-136
DOI: 10.1016/s0921-5107(02)00682-7
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Characterisation of implanted surface layers in ion-thinned semiconductors by transmission electron microscopy
Journal article published in 2003 by
D. Jacob 
,
A. Lefebvre
,
A. Lefebvre
This paper was not found in any repository, but could be made available legally by the author.
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