Published in
Elsevier, Thin Solid Films, 19(515), p. 7634-7638
DOI: 10.1016/j.tsf.2006.11.123
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Carbon incorporation in silicon–carbon films grown at different substrate temperatures
Journal article published in 2007 by
U. Coscia,
G. Ambrosone,
P. Maddalena 
,
A. Setaro,
A. R. Phani,
M. Passacantando
,
A. Setaro,
A. R. Phani,
M. Passacantando
This paper was not found in any repository, but could be made available legally by the author.
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