Published in
Elsevier, Surface Science, (566-568), p. 1143-1146
DOI: 10.1016/j.susc.2004.06.072
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The combined study of the organosilicon films by RBS, ERDA and AFM analytical methods obtained from PECVD and PACVD
Journal article published in 2004 by
A. Mackova,
V. Perina,
Z. Stryhal,
J. Pavlik,
M. Svec,
A. Quédé,
P. Supiot,
G. Borvon,
A. Granier 
,
P. Raynaud
,
P. Raynaud
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