Published in
Elsevier, Surface and Coatings Technology, 18(201), p. 7727-7732
DOI: 10.1016/j.surfcoat.2007.03.021
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Reactive sputtering of TiOxNy coatings by the reactive gas pulsing process
Journal article published in 2007 by
N. Martin 
,
J. Lintymer,
J. Gavoille,
J. M. Chappé,
F. Sthal,
J. Takadoum,
F. Vaz ,
L. Rebouta
,
J. Lintymer,
J. Gavoille,
J. M. Chappé,
F. Sthal,
J. Takadoum,
F. Vaz ,
L. Rebouta
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