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Elsevier, Materials Science and Engineering: B, (114-115), p. 184-192, 2004

DOI: 10.1016/j.mseb.2004.07.054

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Modeling of extrinsic extended defect evolution in ion-implanted silicon upon thermal annealing

Journal article published in 2004 by C. J. Ortiz, F. Cristiano, B. Colombeau, A. Claverie, N. E. B. Cowern
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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