Published in
Elsevier, Microelectronic Engineering, (156), p. 91-96, 2016
DOI: 10.1016/j.mee.2015.11.013
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In situ cleaning of InGaAs surfaces prior to low contact resistance metallization
Journal article published in 2015 by
P.-H. Rodriguez 
,
L. Toselli,
E. Ghegin,
N. Chevalier,
N. Rochat,
E. Martinez,
F. Nemouchi
,
L. Toselli,
E. Ghegin,
N. Chevalier,
N. Rochat,
E. Martinez,
F. Nemouchi
This paper is available in a repository.
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