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Elsevier, Journal of Non-Crystalline Solids, (338-340), p. 183-187

DOI: 10.1016/j.jnoncrysol.2004.02.049

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Role of the rf frequency on the structure and composition of polymorphous silicon films

Journal article published in 2004 by H. Águas, L. Raniero, L. Pereira, A. S. Viana ORCID, E. Fortunato, R. Martins
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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