Published in
Elsevier, Journal of Materials Processing Technology, 1-3(206), p. 462-466
DOI: 10.1016/j.jmatprotec.2007.12.040
Links
Tools
Plasma treatment effects on Si and Si/dielectric film heterostructures
Journal article published in 2008 by
C. Di Franco,
N. Cioffi,
N. Ditaranto 
,
M. S. Vitiello,
M. Sibilano,
L. Torsi,
G. Scamarcio
,
M. S. Vitiello,
M. Sibilano,
L. Torsi,
G. Scamarcio
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Published version:
archiving forbidden
Data provided by 