Published in
Elsevier, Applied Surface Science, 19(253), p. 7942-7946
DOI: 10.1016/j.apsusc.2007.02.065
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Deposition and growth kinetics studies of thin zirconium dioxide films by UVILS-CVD
Journal article published in 2007 by
Mingliang Chen,
Xinyu Zhang,
Qi Fang,
Junying Zhang,
Zijing Lin,
Ian W. Boyd 
This paper was not found in any repository, but could be made available legally by the author.
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