Published in
Elsevier, Vacuum, 10-11(45), p. 1101-1102
DOI: 10.1016/0042-207x(94)90034-5
Links
Tools
N2O plasma etching of polyimides
Journal article published in 1994 by
J. Muñoz,
C. Domínguez 
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Postprint:
archiving forbidden
Published version:
archiving forbidden
Data provided by 