Published in
Materials Science and Engineering, 2(163), p. 187-192
DOI: 10.1016/0025-5416(93)90010-4
Elsevier, Materials Science and Engineering: A, 2(163), p. 187-192
DOI: 10.1016/0921-5093(93)90787-f
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Ion-assisted deposition in unbalanced-magnetron sputtering systems
Journal article published in 1993 by
William D. Sproul
This paper was not found in any repository, but could be made available legally by the author.
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