ABSTRACTFerroelectric epitaxial Pb(Zr,Ti)O₃ (PZT) layers were grown by pulsed laser deposition on SrTiO₃/GaAs templates fabricated by molecular beam epitaxy. The templates present an excellent structural quality and the SrTiO₃/GaAs is abrupt at the atomic scale thanks to surface Ti pre-treatment. The PZT layers contain a- and c- domains, as shown by X-Ray diffraction analyses. Piezoforce microscopy experiments and macroscopic electrical characterizations indicate that PZT is ferroelectric. A relative dielectric permittivity of 164 is extracted from these measurements.