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Institute of Electrical Engineers of Japan, Denki Gakkai Ronbunshi. E, Sensa, Maikuromashin Bumonshi / IEEJ Transactions on Sensors and Micromachines, 9(134), p. 284-289, 2014

DOI: 10.1541/ieejsmas.134.284

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Effect of Bonding Pressure on the Strength of Cu/Cu Direct Bonding by Surface Activated Method

Journal article published in 2014 by Jun Utsumi, Yuko Ichiyanagi ORCID
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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