Published in
phys. stat. sol. (c), 7(0), p. 2368-2371
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Fabrication of sub-50-nm-gate i-AlGaN/GaN HEMTs on sapphire
Journal article published in 2003 by
Akira Endoh,
Yoshimi Yamashita,
Keiji Ikeda,
Masataka Higashiwaki 
,
Kohki Hikosaka,
Toshiaki Matsui,
Satoshi Hiyamizu,
Takashi Mimura1
,
Kohki Hikosaka,
Toshiaki Matsui,
Satoshi Hiyamizu,
Takashi Mimura1
This paper is made freely available by the publisher.
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