Published in
2011 Numerical Simulation of Optoelectronic Devices
DOI: 10.1109/nusod.2011.6041173
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Robust design of subwavelength grating mirror for mid-infrared VCSEL application
Proceedings article published in 2011 by
Christyves Chevallier,
Frédéric Genty,
Nicolas Fressengeas 
,
Joel Jacquet
,
Joel Jacquet
This paper is available in a repository.
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Abstract
We present the design of a Si/Si3N4 subwavelength grating mirror optimized for an integration in mid-infrared VCSEL. The definition of a quality factor adapted to VCSEL requirements and maximized by an optimization algorithm allowed us to obtain a polarization selective and high reflectivity structure. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances.