Published in

IOP Publishing, Japanese Journal of Applied Physics, 1S(55), p. 01AC01, 2015

DOI: 10.7567/jjap.55.01ac01

Links

Tools

Export citation

Search in Google Scholar

Polytype control by activity ratio of silicon to carbon during SiC solution growth using multicomponent solvents

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

Full text: Download

Green circle
Preprint: archiving allowed
Orange circle
Postprint: archiving restricted
Red circle
Published version: archiving forbidden
Data provided by SHERPA/RoMEO

Abstract

Abstract We report on the relationship between grown polytypes and the activity ratio of silicon to carbon during SiC solution growth using multicomponent solvents. From the thermodynamic calculation as well as crystallization experiments, we revealed that a high activity ratio (a Si/a C) in the solution leads to the growth of low-hexagonality polytypes, and low a Si/a C results in the growth of high-hexagonality polytypes. 4H-SiC is stable when a Si/a C is relatively low (∼101 > a Si/a C), 3C-SiC is stable when a Si/a C is relatively high (∼104 < a Si/a C), and 6H-SiC is stable in the intermediate a Si/a C range (∼102 < a Si/a C < ∼103). From these results, the Cr–Si solvent at high temperatures is expected to be suitable for 4H-SiC growth, and Sc–Si and Fe–Si solvents at relatively low temperatures are expected to be suitable for 3C-SiC growth.