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Springer (part of Springer Nature), Applied Physics A: Materials Science and Processing, 4(103), p. 1139-1144

DOI: 10.1007/s00339-010-6059-4

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Optimized sub-wavelength grating mirror design for mid-infrared wavelength range

Journal article published in 2010 by Christyves Chevallier, Nicolas Fressengeas ORCID, Frédéric Genty, Joel Jacquet
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Several subwavelength grating mirrors have been designed for VCSEL application in mid-infrared wavelength range (λ = 2.3 µm). These mirrors are automatically optimized thanks to a global algorithm which maximizes a specially defined quality factor for VCSEL top mirrors. Three different designs based on Si/SiO2, AlGaSb/GaSb and GaAs/AlOx are simulated and exhibit bandwidth as large as 206 nm. Also, the bandwidth is polarisation selective with a TM reflection coefficient higher than 99.9 % while TE coefficient is kept below 90 %. These reflectors present several fabrication solutions with a trade off between technological limitations, tolerances in regard to the fabrication error and mirror quality.