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Optica, Optical Materials Express, 10(3), p. 1576, 2013

DOI: 10.1364/ome.3.001576

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Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

A new mid-infrared (MIR) Vertical Cavity Surface Emitting Laser (VCSEL) structure is proposed. We have integrated to the VCSEL structure both an oxide aperture for lateral confinement, and a sub-wavelength high-contrast-grating top mirror. Upon the GaSb-based half-VCSEL, we have grown a metamorphic AlGaAs heterostructure to enable thermal oxidation and grating mirror fabrication steps. A methodology based on optimization and anti-optimization methods has been used to design the optical grating, with improved parameter tolerances regarding processing errors. Finally, we show the complete fabrication of an electrically-pumped MIR monolithic VCSEL structure implementing both oxide confinement and a subwavelength grating top mirror.