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Elsevier, Optics and Laser Technology, 3(44), p. 626-630

DOI: 10.1016/j.optlastec.2011.09.010

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Optimized Si/SiO2 high contrast grating mirror design for mid-infrared wavelength range: Robustness enhancement

Journal article published in 2012 by Christyves Chevallier, Nicolas Fressengeas ORCID, Frédéric Genty, Joel Jacquet
This paper is available in a repository.
This paper is available in a repository.

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Abstract

A high reflectivity and polarization selective high contrast grating mirror has been designed with the use of an automated optimization algorithm. Through a precise study of the tolerance of the different lengths of the structure, the robustness with respect to the fabrication errors has been enhanced to high tolerance values between 5 % and 210 %. This adjustment of the dimensions of the structure leads to a 250 nm large bandwidth mirror well adapted for a VCSEL application at λ = 2.65 $μ$m and can easily be scaled for other wavelengths. ; Comment: The final publication is available at http://www.sciencedirect.com/science/article/pii/S0030399211002672\#FCANote