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IOP Publishing, Japanese Journal of Applied Physics, 11S(51), p. 11PE03, 2012

DOI: 10.1143/jjap.51.11pe03

IOP Publishing, Japanese Journal of Applied Physics, 11S(51), p. 11PE03

DOI: 10.7567/jjap.51.11pe03

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Porous to Nonporous Transition in the Morphology of Metal Assisted Etched Silicon Nanowires

Journal article published in 2012 by Olan Lotty, Nikolay Petkov, Yordan M. Georgiev, Justin D. Holmes
This paper is available in a repository.
This paper is available in a repository.

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Abstract

A single step metal assisted etching (MAE) process, utilizing metal ion-containing HF solutions in the absence of an external oxidant, has been developed to generate heterostructured Si nanowires with controllable porous (isotropically etched) and non-porous (anisotropically etched) segments. Detailed characterisation of both the porous and non-porous sections of the Si nanowires was provided by transmission electron microscopy studies, enabling the mechanism of nanowire roughening to be ascertained. The versatility of the MAE method for producing heterostructured Si nanowires with varied and controllable textures is discussed in detail.