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IOP Publishing, Japanese Journal of Applied Physics, 6R(44), p. 4211, 2005

DOI: 10.1143/jjap.44.4211

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New Topographic Method of Detecting Microdefects Using Weak-Beam Topography with White X-Rays

Journal article published in 2005 by Kentaro Kajiwara, Shigeru Kimura ORCID, Yoshinori Chikaura
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

We describe a new topographic method of detecting microdefects in nearly perfect crystals. By this method, faint kinematical images of microdefects are observed with minimized dynamical background intensity using the interference effects of X-rays in a sample crystal. We demonstrate the capability of the method by observing “A-swirl” defects in floating-zone (FZ) silicon. The dynamical background intensity is markedly reduced, and weak kinematical images could be observed.