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IOP Publishing, Japanese Journal of Applied Physics, 6B(43), p. L768, 2004

DOI: 10.1143/jjap.43.l768

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InAlN/GaN Heterostructure Field-Effect Transistors Grown by Plasma-Assisted Molecular-Beam Epitaxy

Journal article published in 2004 by Masataka Higashiwaki ORCID, Toshiaki Matsui
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

We report on the plasma-assisted molecular-beam epitaxy growth and device characteristics of InAlN/GaN heterostructure field-effect transistors (HFETs). The In mole fraction in InAlN was estimated to be 0.15 from the X-ray diffraction profile. The surface root-mean-square roughness of the InAlN layer was less than 3 nm. The room-temperature Hall mobility was 654 cm2/V·s, and the sheet electron density was 1.7 ×1013 cm-2. The InAlN/GaN HFET, which had a source-drain spacing of 3 µm and a gate length of 1.5 µm, showed a good pinch-off characteristic. The maximum source-drain current density and extrinsic transconductance were 500 mA/mm and 52 mS/mm, respectively.