Published in
Society of Photo-optical Instrumentation Engineers, Journal of Micro/Nanolithography, MEMS, and MOEMS, 3(12), p. 031101
DOI: 10.1117/1.jmm.12.3.031101
Society of Photo-optical Instrumentation Engineers, Journal of Micro/Nanolithography, MEMS, and MOEMS, 3(13), p. 031301
DOI: 10.1117/1.jmm.13.3.031301
Society of Photo-optical Instrumentation Engineers, Journal of Micro/Nanolithography, MEMS, and MOEMS, 3(11), p. 031401
DOI: 10.1117/1.jmm.11.3.031401
Links
- ORCID
- Society of Photo-optical Instrumentation Engineers | PDF
- Society of Photo-optical Instrumentation Engineers | PDF
- Society of Photo-optical Instrumentation Engineers | PDF
Tools
Special Section Guest Editorial: Alternative Lithographic Technologies
Journal article published in 2014 by
Douglas J. Resnick,
William M. Tong,
Christopher Bencher,
Ricardo Ruiz 
This paper is made freely available by the publisher.
Full text: Download
Preprint: archiving forbidden
Data provided by 