Published in
American Institute of Physics, Journal of Vacuum Science and Technology A, 3(16), p. 1207-1212, 1998
DOI: 10.1116/1.581260
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Studies on structural, electrical, compositional, and mechanical properties of WSix thin films produced by low-pressure chemical vapor deposition
Journal article published in 1998 by
S. Santucci,
L. Lozzi 
,
M. Passacantando ,
P. Picozzi,
P. Petricola,
G. Moccia,
R. Alfonsetti,
R. Diamanti
,
M. Passacantando ,
P. Picozzi,
P. Petricola,
G. Moccia,
R. Alfonsetti,
R. Diamanti
This paper was not found in any repository, but could be made available legally by the author.
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