Published in
American Institute of Physics, Journal of Vacuum Science and Technology B, 6(32), p. 062001
DOI: 10.1116/1.4896761
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Determination of thin film coefficient of thermal expansion and residual strain from freestanding fixed–fixed beams
Journal article published in 2014 by
Ryan M. Pocratsky,
Maarten P. de Boer 
This paper was not found in any repository, but could be made available legally by the author.
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