Published in
American Institute of Physics, Journal of Vacuum Science and Technology A, 6(31), p. 061306
DOI: 10.1116/1.4821186
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Measurements of sputtered neutrals and ions and investigation of their roles on the plasma properties during rf magnetron sputtering of Zn and ZnO targets
Journal article published in 2013 by
L. Maaloul,
L. Stafford 
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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