Published in
American Institute of Physics, Journal of Vacuum Science and Technology B, 1(26), p. 342
DOI: 10.1116/1.2802099
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Defect evolution after germanium preamorphization in silicon on insulator structures
Journal article published in 2008 by
P. F. Fazzini,
F. Cristiano,
C. Dupré,
A. Claverie,
T. Ernst,
M. Gavelle
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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